IONIX® 10'' HV Circular Sputtering Source

The IONIX® IX10 has a target diameter of 254.0 mm (10'') and can be used with non-magnetic targets varying from 8 - 16 mm in small scale production systems. Optionally targets of 250 mm diameter can be used. The achievable film thickness homogeneity is ±5% on Ø150 mm substrates for selected materials, best distance will be between 50 - 120 mm and  must be optimized for each sputtering target material.

The IX10 features indirect cooling of the target. The modular magnet array is completely isolated from the cooling water. A sliding anode allows easy adjustment of the dark space gap when varying target thickness. Optionally a version with a magnet array for 6 mm thick Ni targets is available.

Via the ISO63 interface the sputtering source can be mounted on a straight Ø1''. Also ISO or CF flange mounted sources are available.


Features

  • internal mounting with ISO63 interface
  • target diameter 10" (254 mm)
  • targets 8 - 16 mm thick, non-magnetic
  • optionally: magnetic targets Ni 6 mm
  • indirectly cooled targets
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø8xØ6 mm

 Technical data

Target   Dimensions  
form circular/planar diameter 294 mm
diameter 10" (254 mm) ± 0.5mm height 80 mm
thickness 8 - 16 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  ISO63
Working pressure argon Construction materials stainless steel
OFHC - type copper
PFTE
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 0.5 ... 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Ti, 75 mm distance 35 Å/s @ 5000W max. pressure ≤ 2 bar open drain
Al, 75 mm distance 60 Å/s @ 5000W Ø tubing Ø10xØ8 mm PTFE
Electrical specifications   Magnet array permanent NdFeB
max. power, watts DC 15 kW DC* max. temperature 60°C
max. power, watts RF 5 kW RF* Accessories and options  
max. current DC 25 A - quick coupling f/t - chimney option
max. voltage DC 1000 V - gas inlet option - flange mounting
connector DC screw terminal
   
connector RF type 7/16 **    
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • Chimney
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • ISO or CF flange mounting option

Dimensions

Dimensions for IX10 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available for Ø32 mm bore (OD 1'' tube)

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