IONIX® 2'' HV Circular Sputtering Source

The IX2 is the smallest IONIX® high vacuum magnetron with target diameter of 50.8 mm (2'') used in thin film research and development as it is the basis for small, versatile and economic R&D type thin film deposition systems. The target thickness can vary from 2 up to 6 mm.

The IX2 features direct cooling of the target with an integrated backing plate. The modular magnet array is completely isolated from the cooling water. A threaded anode allows easy adjustment of the dark space gap when varying target thickness. Optionally a magnet array for magnetic target materials ( for 2 mm Ni, 1 mm Fe) is available or can be retrofitted later.

Via the DN25KF interface the sputtering source can be either mounted on a straight Ø1'' or Ø3/4'' tube or on a tilt. Also ISO or CF flange mounted sources are available.

Features

  • internal mounting with DN25KF interface
  • target diameter 2" (50.8 mm)
  • targets 2 - 6 mm thick, non-magnetic
  • optionally: magnetic targets Ni 2 - 3 mm, Fe 1mm thick
  • directly cooled integrated backing plate
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 81 mm
diameter 2" (50 mm) ± 0,1mm height 58 mm
thickness 2 - 6mm Mounting tube Ø1" x 300 mm
cooling indirect/direct ***
  DN 25 KF
Working pressure argon Construction materials stainless steel
OFHC - type copper
PFTE
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Al, 100 mm distance 8 Å/s @300W max. pressure ≤ 2 bar open drain
Cu, 100 mm distance 15 Å/s @ 300W Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent NdFeB
max. power, watts DC 600 W DC *
max. temperature 60°C
max. power, watts RF 400 W RF *
Accessories and options  
max. current DC 5 A - quick coupling f/t - ±45° flexible tilt
max. voltage DC 1000 V - ferromagnetic materials - 40° insitu tilt
connector DC type N - gas inlet option - chimney option
connector RF type 7/16 ** - pneumatic shutter - flange mounting
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • with or without chimney
  • +/- 45° tilt or 40° insitu-tilt
  • straight tube, OD 1'' or OD 3/4''
  • Pneumatic, electric or manual shutter
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • ISO or CF flange mounting option

Dimensions

Dimensions for IX2 flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN100ISO-K

 

 

 

Dimensions for IX2 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available either for Ø32 mm or Ø25.4 mm bore (OD 1'' or OD 3/4'' tube)

 

 

 

 

 

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