IONIX® 3'' HV Circular Sputtering Source

The IX3 high vacuum magnetron with target diameter of 76.2 mm (3'') is used in thin film research and development as it is the basis for small, versatile and economic R&D type thin film deposition systems. The IX3 can be used with non-magnetic targets varying in thickness from 4 - 8 mm.

The IX3 features direct cooling of the target with an integrated backing plate. A threaded anode allows easy adjustment of the dark space gap with varying target thickness. Optionally a magnet array for magnetic target materials ( for 3 mm Ni, 1 mm Fe) is available or can be retrofitted later.

Via the DN25KF interface the sputtering source can be either mounted on a straight Ø1'' or Ø3/4'' tube or on a tilt. Also ISO or CF flange mounted sources are available.


  • internal mounting with DN25KF interface
  • target diameter 3" (76.2 mm)
  • targets 4 - 8 mm thick, non-magnetic
  • optionally: magnetic targets Ni 3 mm, Fe 1 mm thick
  • directly cooled integrated backing plate
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 110 mm
diameter 3" (76.2 mm) ± 0.25mm height 60 mm
thickness 4 - 8 mm Mounting tube Ø1" x 300 mm
cooling indirect/direct ***
  DN 25 KF
Working pressure argon Construction materials stainless steel
OFHC - type copper
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Al, 100 mm distance 14 Å/s @1000W max. pressure ≤ 2 bar open drain
Cu, 100 mm distance 25 Å/s @ 1000W Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent NdFeB
max. power, watts DC 1250 W DC* max. temperature 60°C
max. power, watts RF 750 W RF* Accessories and options  
max. current DC 5 A - quick coupling f/t - ±45° flexible tilt
max. voltage DC 1000 V - ferromagnetic materials - 40° insitu tilt
connector DC type N - gas inlet option - chimney option
connector RF type 7/16 ** - pneumatic shutter - flange mounting
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • with or without Chimney
  • +/- 45° tilt or 40° insitu-tilt
  • straight tube, OD 1'' or OD 3/4''
  • Pneumatic, electric or manual shutter
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • ISO or CF flange mounting option


Dimensions for IX3 flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN160ISO-K


Dimensions for IX3 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available either for Ø32 mm or Ø25.4 mm bore (OD 1'' or OD 3/4'' tube)