IONIX® 4'' HV Circular Sputtering Source

The IONIX® IX4 has a target diameter of 101.6 mm (4'') and can be used with non-magnetic targets varying from 4 - 10 mm. 

The IX4 features indirect cooling of the target, a sliding anode allows easy adjustment of the dark space gap with varying target thickness. Optionally a magnet array for magnetic target materials ( for 6 mm Ni, 3 mm Fe) is available or can be retrofitted later.

Via the DN25KF interface the sputtering source can be either mounted on a straight Ø1'' or Ø3/4'' tube or on a tilt. Also ISO or CF flange mounted sources are available.


Features

  • internal mounting with DN25KF interface
  • target diameter 4" (101.6 mm)
  • targets 4 - 10 mm thick, non-magnetic
  • optionally: magnetic targets Ni 6 mm, Fe 3 mm thick
  • indirectly cooled targets
  • water tubes Ø6xØ4 mm
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 132 mm
diameter 4" (101.6 mm) ± 0.25mm height 60 mm
thickness 4 - 10 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  DN 25 KF
Working pressure argon Construction materials stainless steel
OFHC - type copper
PFTE
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Mo, 200 mm distance 7 Å/s @ 1000W max. pressure ≤ 2 bar open drain
Cu, 200 mm distance 20 Å/s @ 1000W Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent NdFeB
max. power, watts DC 3000 W DC* max. temperature 60°C
max. power, watts RF 1500 W RF* Accessories and options  
max. current DC 10 A - quick coupling f/t - ±45° flexible tilt
max. voltage DC 1000 V - ferromagnetic materials - 40° insitu tilt
connector DC type N - gas inlet option - chimney option
connector RF type 7/16 ** - pneumatic shutter - flange mounting
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • with or without Chimney
  • +/- 45° tilt or 40° insitu-tilt
  • straight tube, OD 1'' or OD 3/4''
  • Pneumatic, electric or manual shutter
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • ISO or CF flange mounting option

Dimensions

Dimensions for IX4 flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN160ISO-K

 

Dimensions for IX4 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available either for Ø32 mm or Ø25.4 mm bore (OD 1'' or OD 3/4'' tube)

 

 

 

 

 

Notwendige Cookies helfen dabei, eine Webseite nutzbar zu machen, indem sie Grundfunktionen wie Seitennavigation und Zugriff auf sichere Bereiche der Webseite ermöglichen. Die Webseite kann ohne diese Cookies nicht richtig funktionieren. Eventuell werden in den Cookies Informationen über Ihre Daten gespeichert, die bei Ihren nächsten Besuchen aufgerufen werden können. Die in einem Cookie abgelegten Daten vereinfachen z.B. die Suche im Internet. Wir verwenden diese Cookies nicht um personenbezogene Daten zu verwenden. Informationen über die Verwendung der Cookies oder um diese auszuschließen, sollte Sie die entsprechenden Browsereinstellungen anpassen.
Weitere Informationen Ok