IONIX® 6'' HV Circular Sputtering Source

The IONIX® IX6 has a target diameter of 152.4 mm (6'') and can be used with non-magnetic targets varying from 4 - 12 mm in small scale production systems. Optionally targets of 150 mm diameter can be used.

The IX6 features indirect cooling of the target. The modular magnet array is completely isolated from the cooling water. A sliding anode allows easy adjustment of the dark space gap when varying target thickness. Optionally a magnet array for magnetic target materials ( for 4 mm Ni, 2 mm Fe) is available or can be retrofitted later.

Via the DN50KF interface the sputtering source can be mounted on a straight Ø1'' tube or on a tilt. Also ISO or CF flange mounted sources are available.

  • internal mounting with DN50KF interface
  • target diameter 6" (152.4 mm)
  • targets 4 - 12 mm thick, non-magnetic
  • magnetic targets Ni 4 mm, Fe 2 mm thick
  • indirectly cooled targets
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

 

Technical data

Target   Dimensions  
form circular/planar diameter 192 mm
diameter 6" (152.4 mm) ± 0.5mm height 70 mm
thickness 6 - 12 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  DN 25 KF
Working pressure argon Construction materials stainless steel
OFHC - type copper
PFTE
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Mo, 150 mm distance 8 Å/s @ 1000W max. pressure ≤ 2 bar open drain
Cu, 150 mm distance 24 Å/s @ 1000W Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent NdFeB
max. power, watts DC 6000 W DC* max. temperature 60°C
max. power, watts RF 3000 W RF* Accessories and options  
max. current DC 15 A - quick coupling f/t - ±45° flexible tilt
max. voltage DC 1000 V - ferromagnetic materials - 40° insitu tilt
connector DC type N - gas inlet option - chimney option
connector RF type 7/16 ** - pneumatic shutter - flange mounting
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • with or without Chimney
  • +/- 45° tilt or 40° insitu-tilt
  • straight tube, OD 1'' or OD 3/4''
  • Pneumatic, electric or manual shutter
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • ISO or CF flange mounting option

Dimensions

Dimensions for IX6 flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN200ISO-K

 

 

 

Dimensions for IX6 magnetron assembly consisting of sputtering source with chimney, quick coupling feedtrough available for Ø32 mm bore (OD 1'' tube)

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