IONIX® 1'' UHV Circular Sputtering Source

 

IX1U is the smallest IONIX® ultrahigh vacuum magnetron sputtering source with target diameter of 25.4 mm (1'') used in thin film research and development. The target thickness can vary from 1 to 3 mm for non-ferromagnetic targets. The IX1U features indirect cooling of the target and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness.

Optionally a magnet array for magnetic target materials (Fe 0.9 mm, Ni 3 mm with profiles) is available or can be retrofitted later.

Features

  • internal mounting with CF interface
  • target diameter 1" (25.4 mm)
  • targets 1 - 3 mm thick, non-magnetic
  • magnetic targets Ni 3 with profiles, Fe 0.9 mm thick
  • indirectly cooled targets
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 44 mm
diameter 1" (25,4 mm) ± 0,1mm height 64 mm (86 mm)
thickness 1 - 3 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  DN 16 CF
Working pressure argon Construction materials stainless steel
OFHC - type copper
Al2O3
nonmagnetic targets 6x10-3- 5x10-2 mbar Cooling water  
best performance 5x10-3-1,5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Cu, 7 cm distance 15 Å/s @ 100W max. pressure ≤ 2 bar open drain
    Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent SmCO
max. power, watts DC 100 W DC max. temperature 200°C
max. power, watts RF 100 W RF Accessories and options  
max. current DC 5 A - quick coupling f/t - ±45° flexible tilt
max. voltage DC 1200 V - ferromagnetic materials - 40° insitu tilt
connector DC type N  - gas inlet option - chimney option
connector RF type 7/16 ** - pneumatic shutter - flange mounting
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • Chimney
  • +/- 45° tilt or 40° insitu-tilt
  • Pneumatic, electric or manual shutter
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • Flange mounting option

Dimensions

Dimensions for IX1U flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN63CF

 

 

 

 

 

 

 

 

 

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