IONIX® 2'' UHV Circular Sputtering Source

The IX2U ultrahigh vacuum magnetron sputtering source has a target diameter of 50.8 mm (2'') and can be used with non-ferromagnetic targets varying from 1 - 6 mm target thickness.

The IX2U features indirect cooling of the target and a threaded target clamping ring and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness. The magnetron has a fully UHV compatible design utilizing only metallic seals and construction materials with low-outgassing rate. The IX2U is bakeable up to 200°C with its SmCo magnet array inserted and can be in DC, AC, RF and pulsed operation.

The standard version is able to sputter ferromagnetic targets (Fe 1 mm, Ni 2-3 mm, Co 3 mm thick), a version for thicker ferromagnetic target materials ( Ni 5 mm, Co 5 mm, Fe 2 -3 mm thick) is available. The IX2U can be either internally mounted via DN16CF interface or directly flange mounted on a DN63CF flange.

Features

  • internal mounting with CF interface
  • target diameter 2" (50.8 mm)
  • targets 1 - 6 mm thick, non-magnetic
  • magnetic targets: Fe 1 mm, Ni 2-3 mm, Co 3 mm thick
  • optionally: Fe 2 -3 mm, Ni 5 mm, Co 5 mm thick
  • indirectly cooled targets
  • water tubes Ø6xØ4 mm

Technical data

Target   Dimensions  
form circular/planar diameter 64 mm
diameter 2" (50.8 mm) ± 0.1mm height 82 mm (+40 mm CF16)
thickness 1 - 6mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  DN 16 CF
Working pressure argon Construction materials stainless steel
OFHC - type copper
Al2O3
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Al, 100 mm distance 8 Å/s @300W max. pressure ≤ 2 bar open drain
Cu, 100 mm distance 15 Å/s @ 300W Ø tubing Ø6xØ4 mm PTFE
Electrical specifications   Magnet array permanent SmCo
max. power, watts DC 400 W DC* max. temperature 200°C
max. power, watts RF 400 W RF* Accessories and options  
max. current DC 5 A - quick coupling f/t - ±45° flexible tilt
max. voltage DC 1000 V - ferromagnetic materials - 40° insitu tilt
connector DC type N - gas inlet option - chimney option
connector RF type 7/16 ** - pneumatic shutter - flange mounting
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • Chimney
  • +/- 45° tilt or 40° insitu-tilt
  • Pneumatic, electric or manual shutter
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • CF flange mounting option

Dimensions

Dimensions for IX2U flange assembly consisting of sputtering source with chimney, tilt, pneumatic shutter and gas distribution on DN100CF

 

 

 

 

 

 

 

 

 

 

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