IONIX® 6'' UHV Circular Sputtering Source

The IONIX® IX6U magnetron sputtering source has a target diameter of 152.4 mm (6'') and can be used with non-ferromagnetic targets varying from 6 - 12 mm thickness. The magnetron features indirect cooling of the target, discrete target clamping and a sliding anode allowing easy adjustment of the dark space gap when varying target thickness.

The IX6U has a fully UHV compatible design utilizing only metallic seals and construction materials with low-outgassing rate. The IX6U is bakeable up to 200°C with its SmCo magnet array inserted and can be in DC, AC, RF and pulsed operation.

Optionally a version with a magnet array for ferromagnetic target materials ( Ni 4 mm, Fe 2 mm thick) is available. The IX6U can be either internally mounted via DN100CF interface or directly flange mounted on a DN200CF flange.

Features

  • internal mounting with DN100CF interface
  • target diameter 6" (152.4 mm)
  • targets 6 - 12 mm thick, non-magnetic
  • magnetic targets: Ni 4 mm, Fe 2 mm thick
  • indirectly cooled targets
  • magnet array completely isolated from cooling water
  • for DC, AC, RF and pulsed operation
  • water tubes Ø8xØ6 mm

Technical data

Target   Dimensions  
form circular/planar diameter 194 mm
diameter 6" (152.4 mm) ± 0.25mm height 103 mm
thickness 6 - 12 mm Mounting tube Ø1" x 300 mm
cooling indirect ***
  DN 100 CF
Working pressure argon Construction materials stainless steel
OFHC - type copper
Al2O3
nonmagnetic targets 3x10-3- 10-1 mbar Cooling water  
best performance 5x10-3-5x10-2mbar flow 1 l / (min x kW)
Typical rates   max. inlet temperature ≤ 30°C
Mo, 150 mm distance 8 Å/s @ 1000W max. pressure ≤ 2 bar open drain
Cu, 150 mm distance 24 Å/s @ 1000W Ø tubing Ø8xØ6 mm PTFE
Electrical specifications   Magnet array permanent SmCo
max. power, watts DC 3500 W DC* max. temperature 200°C
max. power, watts RF 1500 W RF* Accessories and options  
max. current DC 10 A - quick coupling f/t - chimney option
max. voltage DC 1000 V - ferromagnetic materials - flange mounting
connector DC type N - gas inlet option  
connector RF type 7/16 **    
* This value refers to the magnetron itself. The maximum power is determined by the target material and
its bonding or clamping technique.
** RF-Version requires special connector and/or installation. More details on request.
*** Direct cooling on request.

We reserve the right for technical changes in design and specifications without notice or obligations.

Mounting options

  • Chimney
  • Gas distribution
  • Quick coupling feedtrough
  • Z-Manipulator
  • CF flange mounting option

Dimensions

On request

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